WEKO3
アイテム
生産機器周辺に発生する汚染域の解消方法の開発
https://doi.org/10.57375/00000958
https://doi.org/10.57375/000009583833ef03-9c8b-4d17-a096-89453b2f4b55
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KJ00004179099.pdf (723.6 kB)
|
|
| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2009-04-04 | |||||
| タイトル | ||||||
| タイトル | 生産機器周辺に発生する汚染域の解消方法の開発 | |||||
| タイトル | ||||||
| タイトル | Development of preventive method of corner area locally contaminated by particles around manufactureing tools | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| ID登録 | ||||||
| ID登録 | 10.57375/00000958 | |||||
| ID登録タイプ | JaLC | |||||
| 著者 |
浅田, 敏勝
× 浅田, 敏勝× 舌間, 則文× 笠谷, 祥之× 仁木, 隆志× Asada, Toshikatsu× Shitama, Norihumi× Kasatani, Yoshinobu× Niki, Takashi |
|||||
| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | It has become necessary to save the cost of renewal and operation for a cleanroom. Even though a uniderectional dleanroom has difficulty to keep all space clean, th ratio of productive area should be large as much as possible. We have big issues that the uniderectional C.R.'s (Cleanrooms) equipped with FFU (Fan Filter Unit) locally generated dirty & low grade clean area in a highgrade cleanroom. To solve this problem, we have investigated the effectiveness of installation of the FFU newly designed by us close to model manugactuireng tool and evaluated the control of perational conditon of this FFU to eliminate the high contamination area around the model manufactuireing tools. In this paper, we investigate how do the changed PSL standard particles migratre of transfer in each state of ekectrification in a super cleanroom and verify the dilution effect of secondary ionized air supply from IFFU (Fan Filter Unit equipped With Ionizer) | |||||
| 書誌情報 |
福井工業大学研究紀要. 第一部 号 35, p. 87-93, 発行日 2005-03-18 |
|||||
| 出版者 | ||||||
| 出版者 | 福井工業大学 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 2868571 | |||||
| 書誌レコードID | ||||||
| 識別子タイプ | NCID | |||||
| 関連識別子 | TF00009417 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
