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硬質セラミックス薄膜の膜厚、膜硬さ、および基材硬さと密着性の関係
https://doi.org/10.57375/00000934
https://doi.org/10.57375/00000934a0f50d5c-f33d-4a3a-b02a-e2439d23ee88
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
kiyou3916.pdf (6.6 MB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2009-12-01 | |||||
| タイトル | ||||||
| タイトル | 硬質セラミックス薄膜の膜厚、膜硬さ、および基材硬さと密着性の関係 | |||||
| タイトル | ||||||
| タイトル | The influence of film thickness, substrate hardness,/film hardness on the adhesion of hard ceramic films | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | セラミックス | |||||
| キーワード | ||||||
| 主題Scheme | Other | |||||
| 主題 | 薄膜 | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| ID登録 | ||||||
| ID登録 | 10.57375/00000934 | |||||
| ID登録タイプ | JaLC | |||||
| 著者 |
神田, 一隆
× 神田, 一隆× 嶋田, 安広× 蓮井, 俊介× Kanda, Kazutaka× Shimada, Yasuhiro× Hasui, Syunsuke |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | The influence of film thickness, substrate hardness, and film hardness on the adhesion of hard ceramic films were examined by a scratch test. Hard films were coated on the various hardness of substrates by the arc-ion-plating. The effect of film thickness and substrate hardness to the adhesion was investigated by using TiN film. The influence of film hardness on the adhesion was examined with TiN, CrN, TiCN, and TiAlN films. The adhesion deteriorated linearly with the increase of film thickness. Higher adhesion was obtained for harder substrates, and it fell with the decrease of substrate hardness, but the fall was saturated in the range lower than 50 HRC. The relation between the film hardness and the adhesion was in inverse proportion, and the adhesion was decreased remarkably with the increase of film hardness. | |||||
| 書誌情報 | 号 39, p. 115-122, 発行日 2009-08-01 | |||||
| 出版者 | ||||||
| 出版者 | 福井工業大学 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 18844502 / 18844456 | |||||
| 書誌レコードID | ||||||
| 識別子タイプ | NCID | |||||
| 関連識別子 | TF00009393 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
