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リング電極方式容量結合型高周波放電に対する2種類の高周波電界の重畳効果(その3)
https://doi.org/10.57375/00000285
https://doi.org/10.57375/00000285d88841f6-02a3-41fb-9b34-65edc6555042
| 名前 / ファイル | ライセンス | アクション |
|---|---|---|
KJ00004437915.pdf (490.3 kB)
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| Item type | 紀要論文 / Departmental Bulletin Paper(1) | |||||
|---|---|---|---|---|---|---|
| 公開日 | 2009-04-04 | |||||
| タイトル | ||||||
| タイトル | リング電極方式容量結合型高周波放電に対する2種類の高周波電界の重畳効果(その3) | |||||
| タイトル | ||||||
| タイトル | Effect of Applying Two Kinds of R.F.Fields on Capacitively Coupled R.F.Discharges with ring-like Electrodes (Part 3) | |||||
| 言語 | en | |||||
| 言語 | ||||||
| 言語 | jpn | |||||
| 資源タイプ | ||||||
| 資源タイプ識別子 | http://purl.org/coar/resource_type/c_6501 | |||||
| 資源タイプ | departmental bulletin paper | |||||
| ID登録 | ||||||
| ID登録 | 10.57375/00000285 | |||||
| ID登録タイプ | JaLC | |||||
| 著者 |
長濱, 治男
× 長濱, 治男× Nagahama, Haruo |
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| 抄録 | ||||||
| 内容記述タイプ | Abstract | |||||
| 内容記述 | In a inductively or capacitively coupled r.f.discharge by a single frequency, the transition voltage Vc or Pc from glow to arc discharge depends on the gas pressure p. When superposing two applied fields with different frequencies at the same time, if Vc decreases comparing with the value of single frequency discharge, r.f.discharge plasma with high ionization state can be easily generated. Effects of superposing two applied fields with different frequencies, that is, 2MHz and 13.5MHz have been studied. As a result, Vc of 2MHz side has decreases by the superposed effects in the low pressure region(ω>ν),but Vc has not decreases by the superposed effects in the high pressure region (ω<ν). Variations of Pc by the superposed effects in the discharge space of 13.5MHz side have not been able to in all pressure region. In this paper, it is described that the difference of the superposed effect was theoretically studied from the absorption electric power of plasma electron in the low pressure region (ω>ν). | |||||
| 書誌情報 |
福井工業大学研究紀要. 第一部 号 36, p. 17-24, 発行日 2006-03-18 |
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| 出版者 | ||||||
| 出版者 | 福井工業大学 | |||||
| ISSN | ||||||
| 収録物識別子タイプ | ISSN | |||||
| 収録物識別子 | 2868571 | |||||
| 書誌レコードID | ||||||
| 識別子タイプ | NCID | |||||
| 関連識別子 | TF00008744 | |||||
| 著者版フラグ | ||||||
| 出版タイプ | VoR | |||||
| 出版タイプResource | http://purl.org/coar/version/c_970fb48d4fbd8a85 | |||||
