{"created":"2023-06-20T13:43:16.776158+00:00","id":991,"links":{},"metadata":{"_buckets":{"deposit":"47facf26-240e-489c-8d7d-608114fa2644"},"_deposit":{"created_by":2,"id":"991","owners":[2],"pid":{"revision_id":0,"type":"depid","value":"991"},"status":"published"},"_oai":{"id":"oai:fut.repo.nii.ac.jp:00000991","sets":["1"]},"author_link":["11940","11941"],"item_10002_biblio_info_7":{"attribute_name":"書誌情報","attribute_value_mlt":[{"bibliographicIssueDates":{"bibliographicIssueDate":"2011-07-31","bibliographicIssueDateType":"Issued"},"bibliographicIssueNumber":"41","bibliographicPageEnd":"10","bibliographicPageStart":"1","bibliographic_titles":[{"bibliographic_title":"福井工業大学研究紀要"}]}]},"item_10002_description_5":{"attribute_name":"抄録","attribute_value_mlt":[{"subitem_description":"When applying plasma, many different plasma conditions such as the case where a low electron temperature is required, the case which is uniform in the wide area of the plasma electron density are required. To create plasma, the plasma control parameter of sample gas pressure p, ionization voltage Vs and the ionization electric power Pa is important. Also, to investigate basic plasma parameter of the electron temperature Te of the created plasma and electron densities Ne is required. In this paper, changing sample gas into Ne gas from He gas and examining relation between the plasma control parameter and plasma parameter experimentally are reported.","subitem_description_type":"Abstract"}]},"item_10002_identifier_registration":{"attribute_name":"ID登録","attribute_value_mlt":[{"subitem_identifier_reg_text":"10.57375/00000985","subitem_identifier_reg_type":"JaLC"}]},"item_10002_publisher_8":{"attribute_name":"出版者","attribute_value_mlt":[{"subitem_publisher":"福井工業大学"}]},"item_10002_relation_11":{"attribute_name":"書誌レコードID","attribute_value_mlt":[{"subitem_relation_type_id":{"subitem_relation_type_id_text":"TF00009444","subitem_relation_type_select":"NCID"}}]},"item_10002_version_type_20":{"attribute_name":"著者版フラグ","attribute_value_mlt":[{"subitem_version_resource":"http://purl.org/coar/version/c_970fb48d4fbd8a85","subitem_version_type":"VoR"}]},"item_creator":{"attribute_name":"著者","attribute_type":"creator","attribute_value_mlt":[{"creatorNames":[{"creatorName":"長濱, 治男"}],"nameIdentifiers":[{"nameIdentifier":"11940","nameIdentifierScheme":"WEKO"}]},{"creatorNames":[{"creatorName":"Nagahama, Haruo","creatorNameLang":"en"}],"nameIdentifiers":[{"nameIdentifier":"11941","nameIdentifierScheme":"WEKO"}]}]},"item_files":{"attribute_name":"ファイル情報","attribute_type":"file","attribute_value_mlt":[{"accessrole":"open_date","date":[{"dateType":"Available","dateValue":"2023-04-12"}],"displaytype":"detail","filename":"kiyou4101.pdf","filesize":[{"value":"5.5 MB"}],"format":"application/pdf","licensetype":"license_note","mimetype":"application/pdf","url":{"label":"kiyou4101.pdf","url":"https://fut.repo.nii.ac.jp/record/991/files/kiyou4101.pdf"},"version_id":"e28e5e9a-6b7b-4035-8676-94826bfadb8c"}]},"item_keyword":{"attribute_name":"キーワード","attribute_value_mlt":[{"subitem_subject":"High frequency discharge","subitem_subject_scheme":"Other"},{"subitem_subject":"plasma","subitem_subject_scheme":"Other"},{"subitem_subject":"sample gas pressure","subitem_subject_scheme":"Other"},{"subitem_subject":"ionization electric power","subitem_subject_scheme":"Other"},{"subitem_subject":"electron density","subitem_subject_scheme":"Other"},{"subitem_subject":"electron temperature","subitem_subject_scheme":"Other"}]},"item_resource_type":{"attribute_name":"資源タイプ","attribute_value_mlt":[{"resourcetype":"departmental bulletin paper","resourceuri":"http://purl.org/coar/resource_type/c_6501"}]},"item_title":"低気圧誘導結合型高周波放電プラズマのプラズマ制御パラメーターとプラズマパラメーターに関する研究(その2)","item_titles":{"attribute_name":"タイトル","attribute_value_mlt":[{"subitem_title":"低気圧誘導結合型高周波放電プラズマのプラズマ制御パラメーターとプラズマパラメーターに関する研究(その2)"},{"subitem_title":"Experimental Studies on the Relation between the Plasma Control Parameter and Plasma Parameter of Inductively Coupled R.F. Discharge in the Low Pressure (Part 2)","subitem_title_language":"en"}]},"item_type_id":"10002","owner":"2","path":["1"],"pubdate":{"attribute_name":"公開日","attribute_value":"2011-07-31"},"publish_date":"2011-07-31","publish_status":"0","recid":"991","relation_version_is_last":true,"title":["低気圧誘導結合型高周波放電プラズマのプラズマ制御パラメーターとプラズマパラメーターに関する研究(その2)"],"weko_creator_id":"2","weko_shared_id":-1},"updated":"2023-06-20T14:21:30.535384+00:00"}